Fuji-Tech International Co., Ltd.

Hot N2 equipment is an equipment designed for the prevention from adhesion of powder or foreign substances to piping etc. The supplied nitrogen gas is heated to a predetermined temperature with a halogen lamp, and the warmed nitrogen gas is sent out. By adopting the vacuum pump exhaust gas side piping of semiconductor or liquid crystal manufacture equipment, you can make use of the functions that prevent reaction by-products from sticking to the inside of piping occurred in the latter part of chamber